oxide ceramic sputtering target

Product Description

TYR material supply all kinds of ceramic sputtering target , compound semiconductor target include Oxide sputtering target , Fluoride sputtering target , Boride sputtering target , Carbide sputtering target , Nitride sputtering target , Sulfide sputtering target , Selenide sputtering target , Silicide sputtering target , Telluride sputtering target , Antimonide sputtering target , Arsenide sputtering target ......

The available made method include hot pressing , HP, , hot/cold isostatic pressing , HIP, CIP, , and vacuum melting, vacuum sintering

Spec.: Diameter: **5.6mm , *4",  max. Single piece Size: Length: 1mm, if larger size than this, we can do it as tiles joint by *5 degree or *0 degree.
Shape:  discs, plate, rod, tube, sheet, Delta, Rotatable and per drawing

TYR will base on each different material to select the best way to made it and sure the finish ceramic sputtering target  to be best.

Oxide Ceramic sputtering target :
Aluminum  Oxide , Al2O3             Antimony  Oxide , Sb2O3     
Antimony:Tin Dioxide , Sb:SnO, ATO    Barium Titanate , BaTiO3   
Bismuth Oxide , Bi2O3               Cerium oxide , CeO2       
Cerium fluoride , CeF3               Chromium Oxide ,CrO, Cr2O3    
Copper Oxide , CuO                 Dysprosium Oxide , Dy2O3   
Erbium Oxide , Er2O3               Europium Oxide , Eu2O3
Gadolinium Oxide , Gd2O3           Hafnium Oxide, HfO2     
Holmium Oxide , Ho2O3             Indium Tin Oxide, In2O*-SnO2, ITO      
Indium Zinc Oxide, In2O*-ZnO, IZO   Indium Oxide , In2O3      
Indium Gallium Zinc Oxide, IGZO , In2O3+Ga2O3+ZnO       
Iron Oxide , Fe2O3, Fe3O4           Lanthanum Aluminate , LaAl2O3,    
LSMO ,  La0.*7Sr0.*3MnO3      
Lead  Zirconate , PbZrO3            Lead Oxide, PbO   
Lead Titanate , PbTiO3                Lead Zirconate , PbZrO3      
Lead Zirconate-Titanate, PZT , PbZrO3 + PbTiO3   
Lutetium Oxide , Lu2O3 
Magnesium Oxide , MgO              Molybdenum Oxide , MoO  
Molybdenum Oxide , MoO3,            Neodymium Oxide , Nd2O3,     
Nickel Oxide, NiO                    Niobium Pentoxide , Nb2O5, Nb2Ox  
Neodymium Oxide , Nd2O3,            Nickel Oxide, NiO    
Praseodymium Oxide , Pr6O*1,          Samarium Oxide , Sm2O3     
Scandium Oxide , Sc2O3                Silicon Monoxide , SiO 
Silicon Dioxide , SiO2                  Strontium Titanate , SrTiO3,     
Tantalum Pentoxide , Ta2O5,            Terbium Oxide , Tb4O7   
Thulium Oxide , Tm2O3               Titanium Oxide , Ti2O3, Ti3O5
Titanium Monoxide , TiO                Titanium Dioxide , TiO2 
Tungsten Oxide , WO3, WO2.9, WO3 doped Li2O  
Vanadium Pentoxide , V2O5, VO2        Yttrium Oxide , Y2O3  
Ytterbium Oxide , Yb2O3      
Zinc Oxide , ZnO                     Zinc Aluminum Oxide, AZO , Al2O*-ZnO, ZnO-Al
Ga2O3 doped ZnO , GZO               Zirconium oxide , ZrO2     
ZrO2 - Y2O3 stabilized , YSZ,           ZrO2 + SiO2
 

~Fluoride Ceramic sputtering target   
Aluminum Fluoride , AlF3 target     
Barium Fluoride , BaF2 target   
Cadmium Fluoride , CdF2 target      
Calcium Fluoride, CaF2 target     
Cerium Fluoride , CeF3 target   
Dysprosium Fluoride , DyF3 target
Erbium Fluoride , ErF3 target      
Lanthanum  Fluoride, LaF3 target     
Lithium Fluoride , LiF target 
Magnesium Fluoride, MgF2 target   
Neodymium Fluoride, NdF3 target    
Potassium Fluoride , KF, target      
Praseodymium Fluoride , PrF3 target     
Lead Fluoride , PbF2 target   
Sodium Fluoride , NaF target    
Strontium Fluoride , SrF3 target    
Samarium Fluoride , SmF3 target
Cryolite Na3AlF6 target       
Ytterbium  Fluoride , YbF3 target     
Yttrium Fluoride , YF3target

Boride Ceramic sputtering target   
Chromium Boride , Cr2B, CrB2, CrB, Cr5B3 target      
Hafnium Boride , HfB2 target      
Iron Boride , FeB target      
Lanthanum Boride , LaB6 target      
Molybdenum Boride , Mo2B, Mo2B5 target      
Neodymium Boride , NdB, NdB2 target      
Tantalum Boride , TaB, TaB2 target      
 Titanium Boride, TiB2 target      
Tungsten Boride , WB, WB2, W2B5 target      
Vanadium Boride , VB, VB2 target      
 Zirconium Boride , ZrB2 target  

Carbide Ceramic sputtering target  
Boron Carbide, B4C target    
Chromium Carbide , Cr3C2, CrC target     
Hafnium Carbide, HfC target    
Molybdenum Carbide , Mo2C target     
Niobium Nitride , NbC target    
Silicom Carbide , SiC target     
Tantalum Carbide , TaC target     
Titanium Carbide, TiC target    
Titanium Carbon Nitride , TiCN target       
Tungsten Carbide , W2C, WC target      
Tungsten Carbide Doped with Nickel , WC+Ni target     
Tungsten Carbide Doped with Cobalt , WC+Co target      
Vanadium Carbide , VC target    
Zirconium Carbide, ZrC target 

Nitride Ceramic sputtering target  
Aluminum Nitride , AlN target    
Boron Nitride, BN target   
Hafnium Nitride, HfN target     
Niobium Niride , NbN target      
Silicom Nitride , Si3N4 target      
Tantalum Nitride , TaN target      
 Titanium Carbon nitride , TiCN target    
Titanium Nitride, TiN target     
Vanadium Nitride , VN target     
Zirconium Nitride , ZrN target
        
Sulfide Ceramic sputtering target 
Cadmium  Sulfide , CdS target      
Copper Sulfide, CuS,Cu2S target      
Indium Sulfide , In2S3 target      
Iron Sulfide, FeS, FeS2 target      
Lead Sulfide , PbS target      
Manganese Sulfide, MnS2 target      
Molybdenum Sulfide , MoS2 target      
Niobium Sulfide , NbS2 target      
Silver Sulfide , AgS. Ag2S target      
Tantalum Suflfide , TaS2 target      
Tin Sulfide , SnS, SnS2 target      
Tungsten Sulfide , WS2 target      
Zinc Sulfide , ZnS target  

Silicide Ceramic sputtering target  
Chromium Silicide , CrSi2 target      
Cobalt Silicide , Co3Si target      
Hafnium Silicide , HfSi2 target      
Molybdenum silicide, MoSi2, Mo5Si3 target      
Nickel Silicide , NiSi target      
Niobium Silicide , Nb5Si3, NbSi2 target      
Tantalum Silicide , Ta5Si3, TaSi2 target      
Titanium silicide, Ti5Si3, TiSi2 target      
Tungsten Silicide , WSi2 target      
Vanadium silicide , V3Si, VSi2 target      
Zirconium Silicide , ZrSi2 target     
 
Selenide Ceramic sputtering target  
Aluminum Selenide , Al2Se3 target      
Antimony Selenide , Sb2Se3 target      
Arsenic Selenide , As2Se3 target      
Bismuth Selenide,  Bi2Se3 target      
Cadmium Selenide , CdSe target      
Copper Selenide, CuSe, Cu2Se target      
Gallium Selenide, Ga2Se3 target      
Gernium Selenide, GeSe  target      
Indium Selenide, In2Se3 target      
Lead Selenide, PbSe target      
Molybdenum Selenide, MoSe2 target      
Manganese Selenide, MnSe target      
Niobium Selenide , NbSe2 target      
Tantalum Selenide , TaSe2 target      
Tungsten Selenide , WSe2 target      
Zinc Selenide , ZnSe target  

Antimonide sputtering target 
Indium Antimonide , InSb target     
Gallium Antimonide , GaSb target      
Nickel Antimonide , NiSb target  
   
Arsenide sputtering target  
Indium Arsenide , InAs target      
Tin Arsenide , SnAs target      
Gallium Arsenide , GaAs target      
    
Telluride sputtering target  
Arsenic Telluride , As2Te3 target     
Antimony Telluride, SbTe, Sb2Te3 target      
Bismuth Telluride , Bi2Te3, BiTe target 
Bismuth Antimony Telluride , Bi-Sb-Te target
Cadmium Telluride, CdTe target      
Copper Telluride , CuTe, Cu2Te target     
Gallium Telluride , GaTe target      
Geranium Telluride , GeTe target     
Geranium Antimony Telluride , Ge-Sb-Te target      
Lead Telluride , PbTe target  
Tin Telluride, SnTe target
Molybdenum Telluride, MoTe2 target      
Niobium Telluride, NbTe2 target      
Silver Telluride, Ag2Te target     
Tantalum Telluride, TaTe2 target      
Tungsten Telluride , WTe2, sputtering target      
Zinc Telluride , ZnTe target